1305.0557 (B. D. Hauer et al.)

A general procedure for thermomechanical calibration of
nano/micro-mechanical resonators    [PDF]

B. D. Hauer, C. Doolin, K. S. D. Beach, J. P. Davis

We provide a detailed description of a general procedure by which a nano/micro-mechanical resonator can be calibrated using its thermal motion. A brief introduction to the equations of motion for such a resonator is presented, followed by a detailed derivation of the corresponding power spectral density (PSD) function. The effective masses for a number of different resonator geometries are determined using both finite element method (FEM) modeling and analytical calculations.

View original: http://arxiv.org/abs/1305.0557